Publications

Authors:

Sidahmed Sidahmed Alamin, Khaled; Appello, Davide; Beghi, Alessandro; Dall'Ora, Nicola; Depaoli, Fabio; Di Cataldo, Santa; Fummi, Franco; Gaiardelli, Sebastiano; Lora, Michele; Macii, Enrico; Mascolini, Alessio; Pagano, Daniele; Ponzio, Francesco; Antonio Susto, Gian; Vinco, Sara

Title:

An AI-Enabled Framework for Smart Semiconductor Manufacturing

Year:

2024

Type of item:

Contributo in atti di convegno

Tipologia ANVUR:

Contributo in Atti di convegno

Language:

Inglese

Format:

Elettronico

Congresso:

IEEE Design, Automation and Test in Europe Conference and Exhibition (DATE)

Place:

Valencia, Spain

Period:

25 - 27 March 2024

Page numbers:

1-6

Keyword:

Semiconductor manufacturing

Short description of contents:

With the rise of Machine Learning (ML) and Artificial Intelligence (AI), the semiconductor industry is undergoing a revolution in how it approaches manufacturing. The SMART-IC project (DATE'24 MPP category: initial stage) works in this direction, by proposing an AI-enabled framework to support the smart monitoring and optimization of the semiconductor manufacturing process. An AI-powered engine examines sensor data recording physical parameters during production (like gas flow, temperature, voltage, etc.) as well as test data, with different goals: (1) the identification of anomalies in the production chain, either offline from collected data-traces or online from a continuous stream of sensed data; (2) the forecasting of new data of the future production; and (3) the automatic generation of synthetic traces, to strengthen the data-based algorithms. All such tasks provide valuable information to an advanced Manufacturing Execution System (MES), which reacts by optimizing the production process and management of the equipment maintenance policies. SMART-IC is a 300k€ academic project funded by the Italian Ministry of University and supported by STMicroelectronics and Technoprobe with industrial expertise and real-world applications. This paper shares the view of SMART-IC on the future of semiconductor manufacturing, the preliminary efforts, and the future results that will be reached by the end of the project, in 2025.

Web page:

https://ieeexplore.ieee.org/document/10546768

Product ID:

140091

Handle IRIS:

11562/1128688

Last Modified:

January 16, 2025

Bibliographic citation:

Sidahmed Sidahmed Alamin, Khaled; Appello, Davide; Beghi, Alessandro; Dall'Ora, Nicola; Depaoli, Fabio; Di Cataldo, Santa; Fummi, Franco; Gaiardelli, Sebastiano; Lora, Michele; Macii, Enrico; Mascolini, Alessio; Pagano, Daniele; Ponzio, Francesco; Antonio Susto, Gian; Vinco, Sara, An AI-Enabled Framework for Smart Semiconductor Manufacturing  in IEEE Design, Automation and Test in Europe Conference and Exhibition (DATE) , Proceedings of "IEEE Design, Automation and Test in Europe Conference and Exhibition (DATE)" , Valencia, Spain , 25 - 27 March 2024 , 2024 , pp. 1-6

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